Abstract: In order to analyze the influence of different grooved structure flexible substrates on the stress and strain of the fiber under the lamination process, the COMSOL software was used to simulate the lamination process of the fiber embedded in different groove type (U-shaped, trapezoidal, rectangular) flexible substrates. The influence of the size of the structure on the fiber offset gives the optimal slot structure. The results show that the fiber embedded in the rectangular groove flexible substrate can reduce the offset of the fiber during the lamination process, and the width and depth of the optimal rectangular slot structure are 125 and 145 μm, respectively. The maximum stress and maximum offset of the fiber at this time are 19.89 MPa and 2.0403 μm, respectively.