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田庆庆, 徐晋勇, 李铜, 高波. 溅射功率对Ag-TiN涂层微观组织、耐磨性能影响研究[J]. 桂林电子科技大学学报, 2022, 42(3): 194-198.
引用本文: 田庆庆, 徐晋勇, 李铜, 高波. 溅射功率对Ag-TiN涂层微观组织、耐磨性能影响研究[J]. 桂林电子科技大学学报, 2022, 42(3): 194-198.
TIAN Qingqing, XU Jinyong, LI Tong, GAO Bo. The effect of different sputtering power on the microstructure and wear resistance of Ag-TiN ceramic coating[J]. Journal of Guilin University of Electronic Technology, 2022, 42(3): 194-198.
Citation: TIAN Qingqing, XU Jinyong, LI Tong, GAO Bo. The effect of different sputtering power on the microstructure and wear resistance of Ag-TiN ceramic coating[J]. Journal of Guilin University of Electronic Technology, 2022, 42(3): 194-198.

溅射功率对Ag-TiN涂层微观组织、耐磨性能影响研究

The effect of different sputtering power on the microstructure and wear resistance of Ag-TiN ceramic coating

  • 摘要: 采用直流磁控溅射技术,研究不同功率(60、110、150 W)下,在钛合金基材上制备的Ag-TiN陶瓷涂层的微观结构及性能。分别利用扫描电子显微镜、X射线能谱分析和X射线衍射分析涂层表面、截面的形貌与组织成分。采用往复摩擦磨损试验机测试涂层的耐磨损能力。结果表明,在3组功率下试样涂层厚度分别为2.941、3.625、5.023 μm,表面Ag的质量分数分别为50.97%、70.42%、91.25%,表面主要物相是Ag、TiN与TiO2; 随着功率的增大,涂层表面晶粒体积减小,涂层更加均匀致密; Ag颗粒从涂层中扩散到表面,充当润滑物,降低涂层的摩擦系数,110 W制备的样品摩擦系数降低31%;在载荷10 N和20 N下磨损试验中,涂层表面磨损量减少33%,耐磨损性能比基体材料分别提高了41%和31%。制备的Ag-TiN涂层有效改善了钛合金表面微观结构,提高了涂层耐磨性能。在110 W溅射功率下制备的涂层微观组织良好,摩擦系数较低,耐磨性最佳。

     

    Abstract: The microstructure and properties of Ag-TiN ceramic coatings were studied by DC magnetron sputtering at different power (60 W, 110 W and 150 W). Scanning electron microscopy, energy dispersive X-ray spectroscopy and X-ray diffraction were used to analyze the morphology and microstructure of the coating surface and cross section. The wear resistance of the coating was analyzed by reciprocating friction and wear tester. The results show that the coating thickness of the sample is 2.941 under three groups of power、3.625、5.023 μm. The weight percent of Ag on the surface is 50.97 wt%, 70.42 wt% and 91.25 wt%, and the main phases on the surface are Ag、TiN and TiO2; With the power increases, the grain size of the coating decreases and the coating becomes more uniform and compact; Ag particles diffuse from the coating to the surface and act as lubricant, which reduces the friction coefficient of the ceramic coating. The friction coefficient of the sample decreases by 31% at 110 W sputtering power; In the wear test under 10 N and 20 N load, the wear loss of the coating surface is reduced by more than 33%, and the properties are increased by 41% and 31% times compared with the base material. The Ag-TiN coating can effectively improve the surface microstructure and wear resistance of titanium alloy. Comprehensive analysis shows that the microstructure of the coating prepared at 110 W sputtering power is good, the friction coefficient is low, and the wear resistance is the best.

     

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