Abstract: As a typical geological hazard, soil landslides are difficult to obtain data on the deformation of soil inside slopes through existing technological means. Based on the characteristics of internal soil movement and monitoring principles of landslides, a displacement monitoring scheme for soil landslides based on MEMS technology is proposed: MEMS acceleration sensors are adopted to collect data, the sensor acceleration signal is converted into displacement data, and a ZigBee-based wireless communication module with upper computer software is utilized for data monitoring, achieving the monitoring of internal displacement of soil slopes. The results of actual engineering cases show that the wireless monitoring system for landslides designed using MEMS sensors and ZigBee wireless communication technology can satisfy the monitoring requirements after software program compilation and debugging.